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VLSI Electronics microstructure science

VLSI Electronics microstructure science edited by Norman G. Einspruch [and] Graydon B. Larrabee - New York : Academic Press , 1983 - xii, 601 p.

V. 6. Materials and process characterization.

ISBN: 0122341066

Subjects--Index Terms: Integrated circuits - Very large scale integration

Dewey Class. No.: 621.395 / VER.6

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