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VLSI Electronics microstructure science

VLSI Electronics microstructure science edited by Norman G. Einspruch [and] Dale M. Brown - New York : Academic Press , 1984 - xiv, 527 p.

V. 8: Plasma processing for VLSI.

ISBN: 0122341082

Subjects--Index Terms: Integrated circuits - Very large scale integration

Dewey Class. No.: 621.395 / VER.8

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