TY  - BOOK
AU  - Einspruch, Norman G., ed.
TI  - VLSI Electronics microstructure science
SN  - 0122341066
U1  - 621.395 21st ed.
PY  - 1983///
CY  - New York
PB  - Academic Press
KW  - Integrated circuits - Very large scale integration
N1  - V. 6. Materials and process characterization
ER  -