000			00580nam a2200169Ia 4500
008			130910s9999 xx 000 0 und d
020			_a0122341066
041			_aeng
082			_221st ed. _a621.395 _bVER.6
245			_aVLSI Electronics microstructure science _cedited by Norman G. Einspruch [and] Graydon B. Larrabee _vV.
260			_aNew York : _bAcademic Press , _c1983
300			_axii, 601 p.
500			_aV. 6. Materials and process characterization.
653			_aIntegrated circuits - Very large scale integration
700			_aEinspruch, Norman G., ed.
942			_cEN _2ddc
999			_c10768 _d10768