000			00564nam a2200169Ia 4500
008			130910s9999 xx 000 0 und d
020			_a0122341112
041			_aeng
082			_221st ed. _a621.395 _bVER.11
245			_aVLSI Electronics microstructure science _cedited by Norman G. Einspruch [and] William R. Wisseman _vV.
260			_aNew York : _bAcademic Press , _c1985
300			_axii, 459 p.
500			_aV. 11: Gas microelectronics.
653			_aIntegrated circuits - Very large scale integration
700			_aEinspruch, Norman G., ed.
942			_cEN _2ddc
999			_c10769 _d10769