000			00601nam a2200181Ia 4500
008			130910s9999 xx 000 0 und d
020			_a0122341104
041			_aeng
082			_221st ed. _a621.395 _bVER.10
245			_aVLSI Electronics microstructure science _cedited by Norman G. Elinspruch [and] Robert S. Bauer _vV.
260			_aNew York : _bAcademic Press , _c1981
300			_axi, 383 p.
300			_efigures
500			_aV. 10: Surface and interface effects in VLSI.
653			_aIntegrated circuits - Very large scale integration
700			_aEinspruch, Norman G., ed.
942			_cEN _2ddc
999			_c10772 _d10772